脉冲激光多层薄膜刻蚀的热力学效应

Xiaoli Liu, Licheng Zhou, Wending Liu, Yifan Zhou, Y. Xiong, JiZhou Wang
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引用次数: 0

摘要

本文以界面效应对非单层结构刻蚀精度的影响为出发点,分析了集成结构薄膜表面/界面温度场、应力场分布和界面突变之间的相关性。在单因素腐蚀实验的基础上,采用理论分析和数值模拟相结合的方法,研究了温度场、应力场与激光特性参数之间的关系。对于聚酰亚胺基金属铝膜,发现了扫描速度与刻蚀特性参数之间的联系。结果表明:当激光照射Al/PI(铝膜厚度为2μm)时,界面温度达到一定值,导致薄膜和衬底变形;薄膜温度场和应力场分布的变化影响了系统内的传热,从而影响了目标薄膜表面的热力学轨迹、热反馈、蚀刻速率和形状。最终,非单层结构的Al/PI集成的蚀刻和去除归因于热和应力场效应的相互作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermodynamic effects of pulsed laser multilayer thin film etching
The impact of the interface effect on the etching accuracy of a non-single-layer structure was utilized as a starting point in this work to analyze the correlation between the integrated structure's film surface/interface temperature field, stress field distribution, and interface mutation. Based on single-factor etching experiments, the relationship between the temperature field, stress field, and laser characteristic parameters was evaluated via a combination of theoretical analysis and numerical simulation. For polyimide-based metal aluminum film, a connection between scanning speed and etching characteristic parameters was discovered. The results illustrate that when Al/PI (aluminum film thickness of 2μm) was irradiated by a laser, the interface temperature reached a certain value, which caused distortion of the film and substrate. Changes in the distribution of the temperature and stress fields of the film affect the heat transfer in the system and thus affect the thermodynamic trajectory, thermal feedback, etching rate, and shape of the target film surface. Ultimately, the etching and removal of the Al/PI integration of the non-single-layer structure are attributed to the interplay of thermal and stress field effects.
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