硅平台上的薄膜光子集成

2015 Opto-Electronics and Communications Conference (OECC) Pub Date : 2015-12-03 DOI:10.1109/OECC.2015.7340136

T. Amemiya, T. Hiratani, D. Inoue, T. Tomiyasu, K. Fukuda, N. Nishiyama, S. Arai

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引用次数: 0

摘要

为了在硅lsi中实际应用片上光互连，我们在硅衬底上使用粘合剂粘合设置了一个“基于inp的薄膜光子集成电路”，并演示了薄膜中的低能量数字传输。

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Membrane photonic integration on Si platform

Toward the practical use of on-chip optical interconnection in Si LSIs, we have set an `InP-based membrane photonic integrated circuit' on a Si substrate using adhesive bonding and demonstrated low-energy digital transmission in the membrane.

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2015 Opto-Electronics and Communications Conference (OECC)

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