基于极化工程的新型氮化镓晶体管

A. Vescan, H. Hahn, B. Reuters, H. Kalisch
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引用次数: 1

摘要

20多年来,III族氮化物一直是固态器件研究中最令人兴奋的领域之一。在此期间,不仅从技术的角度来看,而且更重要的是在理解这些材料及其非常特殊的性质方面取得了重大进展。本文综述了基于四元位垒的异质结构生长、组成控制及其对晶体和电学性能的影响。这种能力获得的额外自由度适用于各种器件设计,例如具有优异输运性能的正常关闭或高ns结构。最后,证明了倒置异质结构中极化诱导二维空穴气体(2dhg)的形成。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Novel GaN-based transistors using polarization engineering
For more than 20 years, the field of group III nitrides has been among the most exciting ones in solid-state device research. During this time, significant progress has been obtained not only from a technological point of view, but also and more importantly in terms of understanding these materials and their very specific properties.This paper gives a summary on our results on the growth of heterostructures based on quaternary barriers, the compositional control and the implications on crystal and electrical properties. The additional degree of freedom acquired by this capability is applied to a variety of device designs such as normally-off or high-ns structures with excellent transport properties. Finally, the formation of polarization-induced two-dimensional hole gases (2DHGs) in inverted heterostructures is demonstrated.
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