V. Samuilov, I. A. Bashmakov, I.B. Butylina, I. Grigorieva, V. Ksenevich, L.V. Solovjova
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GaAs and SiC quantum wire arrays: fabrication and characterisation
We report a novel approach for fabrication of mesoscopic ordered arrays (networks) based on self-organized patterning in complex liquids (nitrocellulose solution). In order to prepare semiconductor quantum wire arrays the networks are used as masks for further reactive-ion-beam etching of GaAs surface or as a precursors for synthesis of SiC on the surface of Si. Auger electron spectroscopy carbon peaks of converted networks exhibit a fine structure typical for SiC.