内膜片压阻式压力传感器的灵敏度

2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia) Pub Date : 2017-10-01 DOI:10.1109/PRIMEASIA.2017.8280381

C. Hong, Noor Faezah Ismail, N. A. M. Yunus, D. Ahmad

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引用次数: 3

摘要

本文重点研究了压阻式压力传感器的优化设计。提出的设计是采用内振膜来提高传感器的灵敏度。对原设计和建议设计进行了比较。文中还讨论了该设计的调整和性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Sensitivity of piezoresistive pressure sensor with inner diaphragm

This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also discussed.

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来源期刊

2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia)

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