深紫外母版使用全固态266nm激光器，功率超过14gb /in/sup / 2/

1999 Digest of Technical Papers. International Conference on Consumer Electronics (Cat. No.99CH36277) Pub Date : 1999-06-22 DOI:10.1109/ICCE.1999.785260

M. Furuki, M. Takeda, H. Yamatsu

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引用次数: 2

摘要

首次利用全固态连续波266nm激光器演示了下一代高密度光盘的深紫外母化工艺。我们使用novolak型抗蚀剂和化学放大抗蚀剂实现了超过14 Gbit/in/sup 2/的密度和可接受的抖动。

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Deep UV mastering using an all-solid-state 266 nm laser for an over 14 Gb/in/sup 2/

The deep UV mastering process of the next generation high-density disk is demonstrated using an all-solid-state CW 266 nm laser for the first time. We achieved a density of over 14 Gbit/in/sup 2/ with acceptable jitter using both novolak type resist and chemically amplified resist.

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来源期刊

1999 Digest of Technical Papers. International Conference on Consumer Electronics (Cat. No.99CH36277)

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