{"title":"二维纳米牛顿传感的压阻悬臂梁","authors":"T. C. Duc, J. Creemer, P. Sarro","doi":"10.1109/MEMSYS.2006.1627867","DOIUrl":null,"url":null,"abstract":"This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Piezoresistive Cantilever for Nano-Newton Sensing in Two Dimensions\",\"authors\":\"T. C. Duc, J. Creemer, P. Sarro\",\"doi\":\"10.1109/MEMSYS.2006.1627867\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627867\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoresistive Cantilever for Nano-Newton Sensing in Two Dimensions
This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.
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