MOSCAP和3D锥度

{"title":"MOSCAP和3D锥度","authors":"D. Thomson, Weiwei Zhang, M. Ebert, Ke Li, J. Reynolds, Bigeng Chen, Xingzhao Yan, H. Du, M. Banakar, Ying Tran, C. Littlejohns, G. Reed","doi":"10.1117/12.2605906","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":131871,"journal":{"name":"Silicon Photonics XVII","volume":"113 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MOSCAP and 3D taper\",\"authors\":\"D. Thomson, Weiwei Zhang, M. Ebert, Ke Li, J. Reynolds, Bigeng Chen, Xingzhao Yan, H. Du, M. Banakar, Ying Tran, C. Littlejohns, G. Reed\",\"doi\":\"10.1117/12.2605906\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":131871,\"journal\":{\"name\":\"Silicon Photonics XVII\",\"volume\":\"113 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-03-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Silicon Photonics XVII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2605906\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Silicon Photonics XVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2605906","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}