G. Duesberg, F. Kreupl, A. Graham, M. Liebau, E. Unger, Z. Gabric, W. Hönlein
{"title":"多壁碳纳米管的可控CVD生长","authors":"G. Duesberg, F. Kreupl, A. Graham, M. Liebau, E. Unger, Z. Gabric, W. Hönlein","doi":"10.1063/1.1514095","DOIUrl":null,"url":null,"abstract":"Many applications of carbon nanotubes (CNTs) require a material with defined properties, however most synthesis routes yield CNTs of varying purity, structure, diameter, and length. Chemical vapor deposition (CVD) allows a good control over the CNTs synthesis and leads to promising results, however the effect of many parameters remains unclear. In order to improve this situation a comprehensive study was carried out under highly controlled conditions. The used CVD reactor was capable to perform deposition processes with temperature deviations smaller than 1°K. The substrates were patterned Fe films with a thickness below 10 nm on silicon/siliconoxide. The effects of the conditioning of the catalyst prior to growth, growth temperature, and growth time were investigated. The synthesis in a hydrogen/acetylene atmosphere yielded pure multi‐walled CNTs with diameters between 10 – 20 nm. The length of the CNTs was accurately controlled by the growth time. The density of the CNTs can be varied by the preconditio...","PeriodicalId":196292,"journal":{"name":"Structural and Electronic Properties of Molecular Nanostructures. XVI International Winterschool on Electronic Properties of Novel Materials","volume":"633 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Controlled CVD‐growth of multiwalled CNTs\",\"authors\":\"G. Duesberg, F. Kreupl, A. Graham, M. Liebau, E. Unger, Z. Gabric, W. Hönlein\",\"doi\":\"10.1063/1.1514095\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Many applications of carbon nanotubes (CNTs) require a material with defined properties, however most synthesis routes yield CNTs of varying purity, structure, diameter, and length. Chemical vapor deposition (CVD) allows a good control over the CNTs synthesis and leads to promising results, however the effect of many parameters remains unclear. In order to improve this situation a comprehensive study was carried out under highly controlled conditions. The used CVD reactor was capable to perform deposition processes with temperature deviations smaller than 1°K. The substrates were patterned Fe films with a thickness below 10 nm on silicon/siliconoxide. The effects of the conditioning of the catalyst prior to growth, growth temperature, and growth time were investigated. The synthesis in a hydrogen/acetylene atmosphere yielded pure multi‐walled CNTs with diameters between 10 – 20 nm. The length of the CNTs was accurately controlled by the growth time. The density of the CNTs can be varied by the preconditio...\",\"PeriodicalId\":196292,\"journal\":{\"name\":\"Structural and Electronic Properties of Molecular Nanostructures. XVI International Winterschool on Electronic Properties of Novel Materials\",\"volume\":\"633 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-10-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Structural and Electronic Properties of Molecular Nanostructures. XVI International Winterschool on Electronic Properties of Novel Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1063/1.1514095\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Structural and Electronic Properties of Molecular Nanostructures. XVI International Winterschool on Electronic Properties of Novel Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/1.1514095","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Many applications of carbon nanotubes (CNTs) require a material with defined properties, however most synthesis routes yield CNTs of varying purity, structure, diameter, and length. Chemical vapor deposition (CVD) allows a good control over the CNTs synthesis and leads to promising results, however the effect of many parameters remains unclear. In order to improve this situation a comprehensive study was carried out under highly controlled conditions. The used CVD reactor was capable to perform deposition processes with temperature deviations smaller than 1°K. The substrates were patterned Fe films with a thickness below 10 nm on silicon/siliconoxide. The effects of the conditioning of the catalyst prior to growth, growth temperature, and growth time were investigated. The synthesis in a hydrogen/acetylene atmosphere yielded pure multi‐walled CNTs with diameters between 10 – 20 nm. The length of the CNTs was accurately controlled by the growth time. The density of the CNTs can be varied by the preconditio...