体CMOS中温度不敏感多晶硅马赫-曾德干涉仪

2019 IEEE 16th International Conference on Group IV Photonics (GFP) Pub Date : 2019-08-01 DOI:10.1109/GROUP4.2019.8853917

Y. Hung, Ming-Yung Jung, Cheng-Tse Tang, T. Yen

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引用次数: 0

摘要

我们在标准体CMOS平台的多晶硅栅极上演示了一种温度不敏感的马赫-曾德尔干涉仪(MZI)，在60 nm波长范围内实现了±4 pm/°C的温度灵敏度。进一步微调温度灵敏度是通过简单地调整带状波导的长度来实现的。

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Temperature-Insensitive Polysilicon Mach-Zehnder Interferometer in Bulk CMOS

We demonstrate a temperature-insensitive Mach-Zehnder interferometer (MZI) on the polysilicon gate of standard bulk CMOS platform and achieve a temperature sensitivity of ± 4 pm/°C over 60 nm wavelength range. Further fine tuning the temperature sensitivity is achieved by simply adjusting the strip waveguide length.

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2019 IEEE 16th International Conference on Group IV Photonics (GFP)

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