Ansheng Liu, L. Liao, J. Basak, H. Nguyen, M. Paniccia, Y. Chetrit, D. Rubin
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Optical silicon modulator and photonic integration
In this paper, we review recent results of high-speed silicon photonic modulators based on electrical-field-induced carrier depletion effect in a silicon-on-insulator waveguide. We also present detailed design, fabrication, and characterization of a photonic integrated circuit on a silicon platform. We demonstrate an aggregate data transmission rate of 200 Gb/s with 8 channels wavelength division multiplexing on a single silicon chip.
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