采用哈特曼-夏克方法的空间扫描波前传感器

C. G. Souza, Henrique Cordeiro, D. W. de Lima Monteiro, Telson Emmanuel O. Crespo, Ú. Abecassis, L. P. Salles
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引用次数: 1

摘要

本文提出了一种基于哈特曼-夏克(H-S)法的非接触测量折射率物体轮廓的简化仪器。传感装置采用四单元(QC)类型的简单CMOS位置敏感检测器(PSD)设计,由四个主动像素传感器(APS)像素组成。准直激光束穿过物体,产生的波前由其轮廓形状决定。我们演示了该波前的重建,因此,物体的轮廓,通过一个移动的单孔径耦合到一个会聚透镜的波前顺序采样。尽管如此,我们提出了仪器校准的一系列步骤,其中包括聚焦步骤,使用QC尚未探索的特征。使用靶透镜作为测试结构,测量其矢状面,相对于数据表值的平均误差为4%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wavefront Sensor for spatial scan using the Hartmann-Shack method
This paper presents a simplified instrument to measure the profile of a refractive object contactlessly based on the Hartmann-Shack (H-S) method. The sensing device has been designed with a simple CMOS Position-Sensitive Detector (PSD) of the quad-cell (QC) type, comprising four Active-Pixel Sensor (APS) pixels. A collimated laser beam traverses the object and the resulting wavefront is shaped by its profile. We demonstrate the reconstruction of this wavefront, and therefore the profile of the object, by sequentially sampling the wavefront through a moving single aperture coupled to a converging lens. Notwithstanding, we propose a sequence of steps for instrument calibration, among them the focalization step, using a feature of the QC not yet explored. A target lens was used as a test structure and its sagitta was measured, presenting an average error of 4% with respect to the datasheet value.
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