基于AFM的接触力参数辨识

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI:10.1109/ICMENS.2004.122

E. Abdel-Rahman, A. Nayfeh

{"title":"基于AFM的接触力参数辨识","authors":"E. Abdel-Rahman, A. Nayfeh","doi":"10.1109/ICMENS.2004.122","DOIUrl":null,"url":null,"abstract":"We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Parametric Identification of Contact Forces Using AFM\",\"authors\":\"E. Abdel-Rahman, A. Nayfeh\",\"doi\":\"10.1109/ICMENS.2004.122\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.\",\"PeriodicalId\":344661,\"journal\":{\"name\":\"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-08-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2004.122\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.122","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

我们提出了一种利用原子力显微镜(AFM)的接触模式来表征表面接触刚度的综合方法。我们的程序利用半阶探针-尖端-样品系统的次谐波共振与高阶光谱测量相结合，独立确定二次和三次接触刚度系数。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Parametric Identification of Contact Forces Using AFM

We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)

自引率

0.00%

发文量