Robert M. Karl, C. Bevis, Raymond Lopez-Rios, Jonathan T. Reichanadter, D. Gardner, Christina L. Porter, E. Shanblatt, M. Tanksalvala, G. Mancini, M. Murnane, H. Kapteyn, D. Adams
{"title":"多波束平面摄影","authors":"Robert M. Karl, C. Bevis, Raymond Lopez-Rios, Jonathan T. Reichanadter, D. Gardner, Christina L. Porter, E. Shanblatt, M. Tanksalvala, G. Mancini, M. Murnane, H. Kapteyn, D. Adams","doi":"10.1117/12.2220416","DOIUrl":null,"url":null,"abstract":"We present an extension to ptychography that allows simultaneous deconvolution of multiple, spatially separate, illuminating probes. This enables an increased field of view and hence, an increase in imaging throughput, without increased exposure times. This technique can be used for any non-interfering probes: demonstrated with multiple wavelengths and orthogonal polarizations. The latter of which gives us spatially resolved polarization spectroscopy from a single scan.","PeriodicalId":193904,"journal":{"name":"SPIE Advanced Lithography","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multiple beam ptychography\",\"authors\":\"Robert M. Karl, C. Bevis, Raymond Lopez-Rios, Jonathan T. Reichanadter, D. Gardner, Christina L. Porter, E. Shanblatt, M. Tanksalvala, G. Mancini, M. Murnane, H. Kapteyn, D. Adams\",\"doi\":\"10.1117/12.2220416\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present an extension to ptychography that allows simultaneous deconvolution of multiple, spatially separate, illuminating probes. This enables an increased field of view and hence, an increase in imaging throughput, without increased exposure times. This technique can be used for any non-interfering probes: demonstrated with multiple wavelengths and orthogonal polarizations. The latter of which gives us spatially resolved polarization spectroscopy from a single scan.\",\"PeriodicalId\":193904,\"journal\":{\"name\":\"SPIE Advanced Lithography\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Advanced Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2220416\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Advanced Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2220416","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We present an extension to ptychography that allows simultaneous deconvolution of multiple, spatially separate, illuminating probes. This enables an increased field of view and hence, an increase in imaging throughput, without increased exposure times. This technique can be used for any non-interfering probes: demonstrated with multiple wavelengths and orthogonal polarizations. The latter of which gives us spatially resolved polarization spectroscopy from a single scan.
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