{"title":"金属涂层AFM悬臂梁的光热激振分析","authors":"Shahrul Kadri, H. Fujiwara, K. Sasaki","doi":"10.1117/12.861053","DOIUrl":null,"url":null,"abstract":"We report the vibration reduction in the optically driven V-shaped AFM cantilever with 70 nm gold surface coating. The driving laser at 780 nm is intensity modulated at 1 kHz to 100 kHz and focused on the AFM cantilever surface. The cantilever vibration amplitude is monitored by HeNe probe laser. Two features are observed: high vibration amplitude of the cantilever (1) at several kHz modulation frequencies regime and (2) at around its mechanical resonance. In addition, we found that vibration at the resonance peak increases when the excitation spot is positioned farther from the free end of the cantilever.","PeriodicalId":245973,"journal":{"name":"Southeast Asian International Advances in Micro/Nano-technology","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Analysis of photothermally induced vibration in metal coated AFM cantilever\",\"authors\":\"Shahrul Kadri, H. Fujiwara, K. Sasaki\",\"doi\":\"10.1117/12.861053\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the vibration reduction in the optically driven V-shaped AFM cantilever with 70 nm gold surface coating. The driving laser at 780 nm is intensity modulated at 1 kHz to 100 kHz and focused on the AFM cantilever surface. The cantilever vibration amplitude is monitored by HeNe probe laser. Two features are observed: high vibration amplitude of the cantilever (1) at several kHz modulation frequencies regime and (2) at around its mechanical resonance. In addition, we found that vibration at the resonance peak increases when the excitation spot is positioned farther from the free end of the cantilever.\",\"PeriodicalId\":245973,\"journal\":{\"name\":\"Southeast Asian International Advances in Micro/Nano-technology\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-03-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Southeast Asian International Advances in Micro/Nano-technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.861053\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Southeast Asian International Advances in Micro/Nano-technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.861053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis of photothermally induced vibration in metal coated AFM cantilever
We report the vibration reduction in the optically driven V-shaped AFM cantilever with 70 nm gold surface coating. The driving laser at 780 nm is intensity modulated at 1 kHz to 100 kHz and focused on the AFM cantilever surface. The cantilever vibration amplitude is monitored by HeNe probe laser. Two features are observed: high vibration amplitude of the cantilever (1) at several kHz modulation frequencies regime and (2) at around its mechanical resonance. In addition, we found that vibration at the resonance peak increases when the excitation spot is positioned farther from the free end of the cantilever.
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