FTO衬底上ZnO微棒气敏特性的高灵敏度

2016 International Conference on Microelectronics, Computing and Communications (MicroCom) Pub Date : 2016-07-28 DOI:10.1109/MICROCOM.2016.7522410

M. Sinha, R. Mahapatra, B. Mondal, R. Ghosh

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引用次数: 0

摘要

在90℃的低温条件下，采用水热反应工艺在FTO衬底上合成了平均直径为350 nm的ZnO微棒。实验结果表明，该方法对100 ppm乙醇气体的灵敏度高达568%，对乙醇的响应速度为1.77s，回收率为65.65s。

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High sensitivity of gas sensing properties of ZnO microrods on FTO substrate

ZnO Microrods with average diameter of 350 nm were synthesized on FTO substrate using a hydrothermal reaction process at a low temperature of 90 °C. Experimental results reveal an ultra-high sensitivity about 568% to 100 ppm ethanol gas, a fast response of 1.77s and a recovery of 65.65s to ethanol.

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2016 International Conference on Microelectronics, Computing and Communications (MicroCom)

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