ka波段垂直键合线互连建模及特性研究

Dawei An, Xiang Li, Jinchao Mou, X. Lv
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引用次数: 3

摘要

本文提出了一种新型的键合互连——垂直键合互连。键合互连是实现微波芯片互连的关键技术。键合互连的高度、距离、线数和连接空间对其微波特性有重要影响。本文利用商用三维电磁分析软件HFSS、微波电路设计软件ADS和安捷伦矢量网络分析仪对键合互连的微波特性进行了建模、仿真和优化,并制作了模型,实验结果如本文所示。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling and Characteristic of the Vertical Bonding-Wire Interconnection in Ka-band
This paper announced a new type of bonding interconnect-vertical bonding interconnect. Bonding interconnect is the critical technique for realizing the interconnection of microwave chip. The height, distance, number of wires and joint space of bonding interconnect have important effects on its microwave characteristics. In this paper, commercial 3D electromagnetic analysis software HFSS , microwave circuit design software ADS and Agilent vector network analyzer were used to model, simulate and optimize for the microwave characteristics of bonding interconnect, and produce the model, experimental results shown in this paper.
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