用于真空等离子体工艺中基材温度测量的热传感器的开发与设计

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) Pub Date : 2021-01-26 DOI:10.1109/ElConRus51938.2021.9396518

P. Gornostaev, Viacheslav K. Samojlikov, Maxim S. Golovinskiy, S. Evstafyev

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引用次数: 0

摘要

讨论了电子产品制造中用于测定衬底热状态的方法和装置。根据温度测量的一些重要标准对这些方法进行了评估:性能、抗噪性、灵敏度、测量温度范围。在真空等离子体过程中测量衬底工作温度的原始装置和方法已经开发出来。

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Development and Research of the Design of a Thermal Sensor for Measuring the Temperature of the Substrate Processed in Vacuum-Plasma Processes

Methods and devices used in the manufacture of electronic products for determining the thermal state of substrates are discussed. The methods were evaluated according to a number of criteria important for temperature measurements: performance, noise immunity, sensitivity, temperature range of measurements. Original devices and methods for measuring the operating temperature of substrates in vacuum-plasma processes have been developed.

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2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus)

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