90nm CMOS中4-mm 4000 × 1晶体管阵列模内变化的宽范围空间频率分析

D. Levacq, T. Minakawa, M. Takamiya, T. Sakurai
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引用次数: 7

摘要

为了研究系统的晶片内变化,采用90nm CMOS技术,采用4mm 4000times1晶体管阵列,以1um晶体管间距测量了晶片内阈值电压和导通电流变化,实现了最宽的空间分布范围。空间频率分析表明,两种变化在4 mm范围内都是随机的。测量了这两种变化对体偏的依赖性,并利用幂律模型分析了阈值电压变化与导通电流变化之间的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Wide Range Spatial Frequency Analysis of Intra-Die Variations with 4-mm 4000 × 1 Transistor Arrays in 90nm CMOS
In order to investigate the systematic intra-die variations, the intra-die threshold voltage and on-current variations are measured thanks to 4-mm 4000times1 transistor arrays with 1 mum transistor-pitch in a 90 nm CMOS technology, achieving the widest spatial distribution range. The spatial frequency analysis of the variations indicates that both variations are random across 4 mm. The dependence of both variations on body bias is also measured and the relationships between threshold voltage variations and on-current variations are analyzed by using the alpha-power law model.
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