{"title":"有限元模拟方法在锌等离子体参数测量中的应用","authors":"Yilang Tu, Zhaoquan Chen","doi":"10.1109/ICVRIS.2019.00009","DOIUrl":null,"url":null,"abstract":"The plasma is called the fourth state of matter, which has many different properties from solid, liquid and gaseous. These properties can be widely used in the field of low temperature plasma. In the field of low temperature plasma, there are material surface modification, medicine and so on. We use the emission spectrometer avantes 2048L to enter the density of zinc plasma at atmospheric pressure. It is found that with the increase of input power, the electron temperature and density increase gradually, but the spectral intensity decreases accordingly. Then we use the finite element electromagnetic simulation software HFSS to analyze the electromagnetic distribution of plasma jet, and find that the electromagnetic wave on the plasma surface is traveling wave.","PeriodicalId":294342,"journal":{"name":"2019 International Conference on Virtual Reality and Intelligent Systems (ICVRIS)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application of Finite Element Simulation Method in Measurement of Zinc Plasma Parameters\",\"authors\":\"Yilang Tu, Zhaoquan Chen\",\"doi\":\"10.1109/ICVRIS.2019.00009\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The plasma is called the fourth state of matter, which has many different properties from solid, liquid and gaseous. These properties can be widely used in the field of low temperature plasma. In the field of low temperature plasma, there are material surface modification, medicine and so on. We use the emission spectrometer avantes 2048L to enter the density of zinc plasma at atmospheric pressure. It is found that with the increase of input power, the electron temperature and density increase gradually, but the spectral intensity decreases accordingly. Then we use the finite element electromagnetic simulation software HFSS to analyze the electromagnetic distribution of plasma jet, and find that the electromagnetic wave on the plasma surface is traveling wave.\",\"PeriodicalId\":294342,\"journal\":{\"name\":\"2019 International Conference on Virtual Reality and Intelligent Systems (ICVRIS)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Virtual Reality and Intelligent Systems (ICVRIS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICVRIS.2019.00009\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Virtual Reality and Intelligent Systems (ICVRIS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICVRIS.2019.00009","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Application of Finite Element Simulation Method in Measurement of Zinc Plasma Parameters
The plasma is called the fourth state of matter, which has many different properties from solid, liquid and gaseous. These properties can be widely used in the field of low temperature plasma. In the field of low temperature plasma, there are material surface modification, medicine and so on. We use the emission spectrometer avantes 2048L to enter the density of zinc plasma at atmospheric pressure. It is found that with the increase of input power, the electron temperature and density increase gradually, but the spectral intensity decreases accordingly. Then we use the finite element electromagnetic simulation software HFSS to analyze the electromagnetic distribution of plasma jet, and find that the electromagnetic wave on the plasma surface is traveling wave.
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