{"title":"高性能多层x射线光学","authors":"D. Stearns, R. S. Rosen, S. Vernon","doi":"10.1364/swcr.1991.wc2","DOIUrl":null,"url":null,"abstract":"Multilayer x-ray optics are becoming increasingly important in diverse applications such as x-ray projection lithography1, x-ray laser cavities2, x-ray microscopy3, astronomy4 and spectroscopy5. In this paper we focus on the current development of normal incidence reflective optics for the soft x-ray spectrum of ~45 - 130 Å. The ultimate goal is to develop a soft x-ray imaging system capable of high throughput and diffraction-limited performance over an appropriate image field.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"High Performance Multilayer X-Ray Optics\",\"authors\":\"D. Stearns, R. S. Rosen, S. Vernon\",\"doi\":\"10.1364/swcr.1991.wc2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Multilayer x-ray optics are becoming increasingly important in diverse applications such as x-ray projection lithography1, x-ray laser cavities2, x-ray microscopy3, astronomy4 and spectroscopy5. In this paper we focus on the current development of normal incidence reflective optics for the soft x-ray spectrum of ~45 - 130 Å. The ultimate goal is to develop a soft x-ray imaging system capable of high throughput and diffraction-limited performance over an appropriate image field.\",\"PeriodicalId\":286766,\"journal\":{\"name\":\"Short-Wavelength Coherent Radiation: Generation and Application\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Short-Wavelength Coherent Radiation: Generation and Application\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/swcr.1991.wc2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Short-Wavelength Coherent Radiation: Generation and Application","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/swcr.1991.wc2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Multilayer x-ray optics are becoming increasingly important in diverse applications such as x-ray projection lithography1, x-ray laser cavities2, x-ray microscopy3, astronomy4 and spectroscopy5. In this paper we focus on the current development of normal incidence reflective optics for the soft x-ray spectrum of ~45 - 130 Å. The ultimate goal is to develop a soft x-ray imaging system capable of high throughput and diffraction-limited performance over an appropriate image field.
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