{"title":"深沟槽体CMOS集成微环调谐","authors":"Chen Sun, E. Timurdogan, M. Watts, V. Stojanović","doi":"10.1109/OIC.2013.6552920","DOIUrl":null,"url":null,"abstract":"An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.","PeriodicalId":436079,"journal":{"name":"2013 Optical Interconnects Conference","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"Integrated microring tuning in deep-trench bulk CMOS\",\"authors\":\"Chen Sun, E. Timurdogan, M. Watts, V. Stojanović\",\"doi\":\"10.1109/OIC.2013.6552920\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.\",\"PeriodicalId\":436079,\"journal\":{\"name\":\"2013 Optical Interconnects Conference\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-05-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Optical Interconnects Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OIC.2013.6552920\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Optical Interconnects Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OIC.2013.6552920","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Integrated microring tuning in deep-trench bulk CMOS
An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.