聚焦离子束制造纳米缝隙用于DNA捕获

2006 International Conference on Microtechnologies in Medicine and Biology Pub Date : 2006-05-09 DOI:10.1109/MMB.2006.251547

M. Kumemura, K. Tamura, G. Hashiguchi, D. Collard, H. Fujita

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引用次数: 0

摘要

采用硅蚀刻法和聚焦离子束技术制备了具有纳米尺寸间隙的微机械镊子。用该工艺制成的镊子间隙在15 nm-2 nm范围内。通过捕获DNA分子，证明了这种镊子的有效性。在100个妈妈间隙之间成功捕获了一束λ - dna分子

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Nano-gap fabrication by focused ion beam for DNA trapping

Micromachined tweezers is having nanometer sized gap was fabricated with a silicon etching method and a focussed ion beam technique. The gap of tweezer fabricated by this process was accomplished to be 15 nm-2 mum ranges. The validity of this tweezers was demonstrated by trapping DNA molecules. Trapping of bundle of lambda-DNA molecules between 100 mum gap was succeeded

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2006 International Conference on Microtechnologies in Medicine and Biology

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