金属辅助光栅在0.18 μ m CMOS平台光子电路中的增强耦合

2015 IEEE 12th International Conference on Group IV Photonics (GFP) Pub Date : 2015-08-01 DOI:10.1109/GROUP4.2015.7305987

Li-Chi Yang, San-Liang Lee, Y. Hung

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引用次数: 1

摘要

利用标准块体CMOS平台上现有的金属层作为反射镜，提高了光栅耦合器的输入/输出耦合效率。实验结果表明，光纤耦合性能提高了5.5 db，与仿真结果吻合。

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Enhanced coupling with metal-assisted gratings for photonic circuits on 0.18-um bulk CMOS platform

The input/output coupling efficiency of a grating coupler is enhanced by utilizing the existing metal layers in standard bulk CMOS platform as mirrors. Experimental results demonstrate 5.5-dB improvement on fiber-to-fiber coupling that matches simulated results.

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来源期刊

2015 IEEE 12th International Conference on Group IV Photonics (GFP)

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