锌掺杂对MOVPE生长GaAs表面形貌的影响

2021 26th Microoptics Conference (MOC) Pub Date : 2021-09-26 DOI:10.23919/MOC52031.2021.9598093

Shota Nakagawa, Yukinobu Imamura, Yasushi Hirata, Koji Maeda, M. Arai

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引用次数: 0

摘要

本文研究了金属有机气相外延(MOVPE)在GaAs衬底上生长InAs时，锌掺杂对表面粗糙度的影响。采用原子力显微镜(AFM)和扫描电镜(SEM)对表面粗糙度进行了测量。结果表明，锌的掺杂对提高表面粗糙度是有效的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Zn Doping Effect on Surface Morphology of Metamorphic InAs on GaAs Grown by MOVPE

We investigate the effect of Zn doping on surface roughness during InAs growth on GaAs substrate by metal organic vapor phase epitaxy (MOVPE). The surface roughness was measured by atomic force microscope (AFM) and scanning electron microscope (SEM). We confirmed the Zn doping was effective to improve the surface roughness.

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来源期刊

2021 26th Microoptics Conference (MOC)

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