测量配合物用于薄膜在各种外力作用下的降解研究

Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002. Pub Date : 2002-04-08 DOI:10.1109/SPCMTT.2002.1213723

N.V. Pykhtin, A. Borovsky, A.P. Shugurov

{"title":"测量配合物用于薄膜在各种外力作用下的降解研究","authors":"N.V. Pykhtin, A. Borovsky, A.P. Shugurov","doi":"10.1109/SPCMTT.2002.1213723","DOIUrl":null,"url":null,"abstract":"The given paper is dedicated to develop the measurement complex for the thin films approval and to investigate their degradation in passing current of high density. The investigations performed on the electrical resistance of Ag thin-film conductors have shown that a combination of optical and scanning tunnel microscopy allows one to track the macroscopic samples destruction and to investigate the changing of the surface morphology on different scale levels. The results obtained can be used in developing new materials for microelectronics.","PeriodicalId":125749,"journal":{"name":"Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002.","volume":"66 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measuring complex for thin films degradation investigations under various external actions\",\"authors\":\"N.V. Pykhtin, A. Borovsky, A.P. Shugurov\",\"doi\":\"10.1109/SPCMTT.2002.1213723\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The given paper is dedicated to develop the measurement complex for the thin films approval and to investigate their degradation in passing current of high density. The investigations performed on the electrical resistance of Ag thin-film conductors have shown that a combination of optical and scanning tunnel microscopy allows one to track the macroscopic samples destruction and to investigate the changing of the surface morphology on different scale levels. The results obtained can be used in developing new materials for microelectronics.\",\"PeriodicalId\":125749,\"journal\":{\"name\":\"Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002.\",\"volume\":\"66 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-04-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPCMTT.2002.1213723\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPCMTT.2002.1213723","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本论文致力于开发用于薄膜鉴定的测量复合物，并研究其在高密度通过电流中的降解。对银薄膜导体的电阻进行的研究表明，光学和扫描隧道显微镜相结合可以跟踪宏观样品的破坏，并研究不同尺度水平上表面形貌的变化。所得结果可用于开发微电子新材料。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Measuring complex for thin films degradation investigations under various external actions

The given paper is dedicated to develop the measurement complex for the thin films approval and to investigate their degradation in passing current of high density. The investigations performed on the electrical resistance of Ag thin-film conductors have shown that a combination of optical and scanning tunnel microscopy allows one to track the macroscopic samples destruction and to investigate the changing of the surface morphology on different scale levels. The results obtained can be used in developing new materials for microelectronics.

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Proceedings of the 8th International Scientific and Practical Conference of Students, Post-graduates and Young Scientists Modern Technique and Technologies, 2002. MTT 2002.

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