D. Mercier, M. Chatras, J. Orlianges, C. Champeaux, A. Catherinot, P. Blondy, D. Cros, J. Papapolymerou
{"title":"微机械可调谐腔谐振器","authors":"D. Mercier, M. Chatras, J. Orlianges, C. Champeaux, A. Catherinot, P. Blondy, D. Cros, J. Papapolymerou","doi":"10.1109/EUMA.2003.341043","DOIUrl":null,"url":null,"abstract":"This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.","PeriodicalId":156210,"journal":{"name":"2003 33rd European Microwave Conference, 2003","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"A Micromachined Tunable Cavity Resonator\",\"authors\":\"D. Mercier, M. Chatras, J. Orlianges, C. Champeaux, A. Catherinot, P. Blondy, D. Cros, J. Papapolymerou\",\"doi\":\"10.1109/EUMA.2003.341043\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.\",\"PeriodicalId\":156210,\"journal\":{\"name\":\"2003 33rd European Microwave Conference, 2003\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2003 33rd European Microwave Conference, 2003\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EUMA.2003.341043\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2003 33rd European Microwave Conference, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUMA.2003.341043","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
