M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn
{"title":"用于5微米红外探测的PbTe上的MIS电容器","authors":"M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn","doi":"10.1109/IEDM.1977.189318","DOIUrl":null,"url":null,"abstract":"Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.","PeriodicalId":218912,"journal":{"name":"1977 International Electron Devices Meeting","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"MIS capacitors on PbTe for 5 micron infrared detection\",\"authors\":\"M. Moulin, P. Felix, B. Munier, J. Reboul, N.T. Linhn\",\"doi\":\"10.1109/IEDM.1977.189318\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.\",\"PeriodicalId\":218912,\"journal\":{\"name\":\"1977 International Electron Devices Meeting\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1977 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1977.189318\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1977 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1977.189318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MIS capacitors on PbTe for 5 micron infrared detection
Metal-insulator-semiconductor (MIS) capacitors (Al/Al2O3/p-PbTe and Al/MgO/p-PbTe) on PbTe single crystals have been investigated for 5 micron infrared detection. The PbTe comes from Czochraslki single crystals, annealed to lower the carrier concentration. The insulator layers are e-beam deposited Al2O3and MgO. The C(V) curves of these MIS were checked at 77 K. The p-type semiconductor is depleted at zero bias and the flat-band voltage is from 4 to 10 volts for 1500 A° of insulator. The curves indicate a PbTe carrier concentration near 1016cm-3, in agreement with junction characteristic measurements on the same wafers. Transient capacitance measurements on these MIS capacitors give a transient or storage time of 1 to 5 ms, with a 77 K background. Measurements of conductance and variation of conductance with frequency give a lifetime in PbTe of 0,8 to 2 ns. We conclude that such MIS capacitors can be used for IR detection in PbTe with charge-injection readout.