3-Dimensional Semi-Analytic Model of a Microwave Driven Miniature Plasma JET

Microwave or Radio frequency driven plasma jets play an important role in various technical applications and are usually operated in a capacitive mode. The MMWICP ( M iniature M icrowave W ave ICP ) is a new promising plasma source and successfully transfers the induction principle to a miniature plasma jet. This work presents a 3-dimensional semi-analytic model of the electron density n e of the MMWICP. The model is based on a drift-diffusion equation which is coupled to the electromagnetic model of the MMWICP presented by Klute et al. [1] . An analytic solution is found by expanding the expression of n e into a series of eigenfunctions. The 3-dimensional profile of the electron density is simulated for characteristic values of the power P abs , absorbed by the plasma. The results show that the spatial distribution of n e is highly depended on P abs . The results are found to be in good agreement with experimental measurements.