基于自传感压电传感器的键合过程监测

Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004. Pub Date : 2004-08-23 DOI:10.1109/FREQ.2004.1418440

M. Brokelmann, J. Wallaschek, H. Hesse

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引用次数: 13

摘要

采用自传感压电传感器对焊丝键合过程进行监测。本文从粘结过程监测的研究现状入手，介绍了自传感压电换能器的概念，并首次报道了利用该技术获得的实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Bond process monitoring via self-sensing piezoelectric transducers

Process monitoring via self-sensing piezoelectric transducers was applied to wire bonding. Starting with a description of the state of the art in bond process monitoring this paper introduces the concept of self-sensing piezoelectric transducers and reports first experimental results which have been obtained by using this technique.

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Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.

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