Study on self-sensing electrostatic suspension using a variable capacitor

An electrostatic actuator control system using a variable capacitor has been proposed for achieving levitation without high voltage amplifiers. This paper presented a self-sensing method in this system. The principles of voltage control and position estimation of the floator are described. The static position estimation is reported. The position of the floator was estimated from a capacitance of the variable capacitor and voltage across an electrostatic actuator. A circuit for measurement was fabricated. Basic experimental results show the feasibility of the self-sensing operation of electrostatic suspension.