高可靠性非密封式0.1 /spl μ m GaAs伪晶HEMT MMIC放大器

Y. Chou, D. Leung, R. Lai, J. Scarpulla, M. Biedenbender, R. Grundbacher, D. Eng, P. Liu, A. Oki, D. Streit
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引用次数: 3

摘要

报道了采用0.1 /spl μ m量产AlGaAs/InGaAs/GaAs HEMT工艺制备的q波段低噪声MMIC放大器的高可靠性性能。在Vds=4.2 V、Ids=150 mA/mm的加速直流偏置条件下,对两级平衡放大器进行了空气环境下三种温度(T/亚环境/=255/spl°C、T/亚环境/=270/spl°C和T/亚环境/=285/spl°C)的寿命测试。应力结束后,将MMIC放大器降至室温,测量小信号微波特性。每个温度下的失效时间以室温下测量的/spl Delta/S21=-1.0 dB作为失效标准来确定。活化能(Ea)为1.7 eV,在125/spl℃结温下,预计的中位失效时间(MTF)为6/spl次/10/sup /小时。这是基于MMIC放大器在空气环境中高结温直流应力下的S21失效准则的最先进的0.1 /spl mu/m HEMT可靠性。这一结果证明了一种强大的HEMT技术,该技术在高温操作下不受高电场的应力影响,并证明了HEMT在非密封商业应用中的适用性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High reliability non-hermetic 0.1 /spl mu/m GaAs pseudomorphic HEMT MMIC amplifiers
High reliability performance of a Q-band low-noise MMIC amplifier fabricated using 0.1 /spl mu/m production AlGaAs/InGaAs/GaAs HEMT process technology is reported. Operating at an accelerated DC bias condition of Vds=4.2 V and Ids=150 mA/mm, two-stage balanced amplifiers were lifetested at three temperatures (T/sub ambient/=255/spl deg/C, T/sub ambient/=270/spl deg/C, and T/sub ambient/=285/spl deg/C) in air ambient. After stress, MMIC amplifiers were brought down to room temperature and small-signal microwave characteristics were measured. Failure time for each temperature was determined using /spl Delta/S21=-1.0 dB measured at room temperature as the failure criteria. The activation energy (Ea) is 1.7 eV, achieving a projected median-time-to-failure (MTF) of 6/spl times/10/sup 9/ hours at a 125/spl deg/C junction temperature. This is the state-of-art of 0.1 /spl mu/m HEMT reliability based on S21 failure criteria of MMIC amplifiers under DC stress at high junction temperature in air ambient. This result demonstrates a robust HEMT technology which is immune to the stress effects of high electric field under high temperature operation, and demonstrates the suitability of the HEMTs for non-hermetic commercial applications.
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