激光从硅表面去除微米粒子:一种二维方法

Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505) Pub Date : 2000-09-10 DOI:10.1109/CLEOE.2000.910071

P. Neves, M. Arronte, R. Vilar

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引用次数: 0

摘要

只提供摘要形式。在这项工作中，实验测量了三种不同金属颗粒污染物(Au, 1.2 /spl mu/m;报道了硅上的Cu 3 /spl mu/m和w0.7 /spl mu/m。为了研究清洗效率与污染物类型的关系，考虑了颗粒和衬底对激光辐射的吸收。金属颗粒在基片上的阴影效应对基片内的温度分布进行了二维分析。

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Laser micron particle removal from silicon surfaces: a bidimensional approach

Summary form only given. In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1.2 /spl mu/m; Cu 3 /spl mu/m and W 0.7 /spl mu/m) on silicon are reported. To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered. The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate.

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Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)

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