微电火花加工孔内部轮廓的检测与材料缺陷的检测

H. Almond, D. Allen, Peter Logan
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引用次数: 3

摘要

微细电火花加工(micro-EDM)用于加工导电材料中的孔、槽、腔等微细特征。本文研究了孔径小于soj . m的喷墨打印喷嘴微孔的制备。重要的是,印刷介质能够畅通无阻地流过,因此孔必须尽可能光滑。然而,对这些小特征的内部轮廓进行无损检测是很困难的。在这项研究中,微孔沿着两个相邻箔之间的连接进行加工,以提供一种自然的分离手段,而无需使用二次加工将孔切成两半。然后可以使用扫描电子显微镜(SEM)研究孔洞和未加工的对照样品。研究发现,在微细电火花加工之前,微腔、裂纹和夹杂等缺陷就已经存在,这似乎是材料轧制过程的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Examination of the Internal Profiles of Micro-Electrodischarge Machined Holes and the Detection of Material Defects
Micro-electrodischarge machining (micro-EDM) is used to machine micro-features such as holes, slots and cavities in electrically conductive materials. This paper looks at the fabrication of micro-holes for ink jet printing nozzles where hole diameters are smaller than SOJ.lm. It is important that the printing medium be able to flow through unimpeded, so the bore must be as smooth as possible. However, it is difficult to inspect the internal profiles of such small features non-destructively. In this study, micro-holes were machined along the join between two adjacent foils to provide a natural means of separation without using a secondary process to cut the holes in half. It was then possible to investigate the holes and unmachined control samples using scanning electron microscopy (SEM). It was found that defects such as micro-cavities, cracks and inclusions were already present prior to machining by micro-EDM, seemingly as a result of the material rolling process.
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