基于振动mems的能量采集器的设计与优化

2022 17th Conference on Ph.D Research in Microelectronics and Electronics (PRIME) Pub Date : 2022-06-12 DOI:10.1109/prime55000.2022.9816839

Eduardo Holguin, L. Trojman, L. Prócel, A. Brenes, A. Vladimirescu

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引用次数: 2

摘要

介绍了一种基于微机电系统(MEMS)的闭隙静电谐振器振动能量采集器(VEH)的设计。MEMS产生的电信号通过基于Greinacher倍压器(GVD)的电荷泵电路进行整流。分析了VEH系统的性能，并计算了最佳电阻负载，以最大限度地提高收获功率和工作频率范围。整流器设计为0。18μm技术。使用Cadence Virtuoso对VEH系统进行了验证。所设计的能量采集器的直流输出功率为90。西北纬6点。在53Hz频率下，在加速度幅值为0.33\ mathm {m}/\ mathm {s}^{\wedge}2$的施加振动下，产生95V电压。

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Design and optimization of a Vibrational MEMS-Based Energy Harvester

This paper describes the design of a Vibrational Energy Harvester (VEH) based on a microelectromechanical system (MEMS) with gap-closing electrostatic resonator. The electrical signal generated by the MEMS is rectified with a charge pump circuit based on the Greinacher Voltage Doubler (GVD). The performance of the VEH system is analyzed and an optimal resistive load is calculated to maximize harvested power and frequency range of operation. The rectifier was designed in a 0. 18μm technology. The VEH system was validated with Cadence Virtuoso. The designed energy harvester generates a DC output power of 90. 06nW at 9. 95V under an applied vibration with an acceleration amplitude of $0.33\mathrm{m}/\mathrm{s}^{\wedge}2$ at a frequency of 53Hz.

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2022 17th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)

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