优化衬底电极结构改善矩形直流磁控溅射中等离子体强度均匀性

{"title":"优化衬底电极结构改善矩形直流磁控溅射中等离子体强度均匀性","authors":"Dong-Woo Ko, Se-Hwan Jang, Jae Hyun Kim, Kwan-Yong Lee, Young-Joo Kim","doi":"10.7735/ksmte.2023.32.2.57","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":344634,"journal":{"name":"Journal of the Korean Society of Manufacturing Technology Engineers","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improvement on Plasma Intensity Uniformity in Rectangular DC Magnetron Sputter by Optimizing Structures of Substrate Electrode\",\"authors\":\"Dong-Woo Ko, Se-Hwan Jang, Jae Hyun Kim, Kwan-Yong Lee, Young-Joo Kim\",\"doi\":\"10.7735/ksmte.2023.32.2.57\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":344634,\"journal\":{\"name\":\"Journal of the Korean Society of Manufacturing Technology Engineers\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Korean Society of Manufacturing Technology Engineers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.7735/ksmte.2023.32.2.57\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Society of Manufacturing Technology Engineers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.7735/ksmte.2023.32.2.57","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}