锗纳米柱在锗薄膜中的自组装

T. Le
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引用次数: 0

摘要

本章介绍了利用分子束外延(MBE)技术在Ge(001)衬底上生长锗纳米柱的结果。在生长温度为130℃,Mn浓度为~6%的条件下共沉积Ge和Mn,以保证锗纳米柱的再生。通过观察反射高能电子衍射(RHEED)模式在纳米柱生长过程中的变化,确定了GeMn纳米柱形成的表面信号。透射电子显微镜(TEM)的结构分析表明,具有核壳结构的自组装纳米柱贯穿了锗膜的整个厚度。大多数纳米柱沿生长方向垂直于界面取向。测定的纳米柱直径约为5 ~ 8 nm,最大高度为80 nm。本文提出了一个现象学模型来解释锗纳米柱的自组装驱动力和生长机制。平面内或横向Mn的扩散/偏析是由Mn在Ge中的低溶解度驱动的,而Mn垂直偏析的驱动力是由表面活性剂沿[001]方向的效应引起的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Self-Assembly of GeMn Nanocolumns in GeMn Thin Films
This chapter presents the results of growing GeMn nanocolumns on Ge(001) substrates by means of molecular beam epitaxy (MBE). The samples have been prepared by co-depositing Ge and Mn at growth temperature of 130°C and Mn at concentration of ~6% to ensure the reproduction of GeMn nanocolumns. Based on the observation of changes in reflection high-energy electron diffraction (RHEED) patterns during nanocolumn growth, surface signals of GeMn nanocolumn formation have been identified. Structural analysis using transmission electron microscopy (TEM) show the self-assembled nanocolumns with core-shell structure extend through the whole thickness of the GeMn layer. Most of nanocolumns are oriented perpendicular to the interface along the growth direction. The nanocolumn size has been determined to be about 5–8 nm in diameter and a maximum height of 80 nm. A phenomenological model has been proposed to explain the driving force for self-assembly and growth mechanisms of GeMn nanocolumns. The in-plane or lateral Mn diffusion/segregation is driven by a low solubility of Mn in Ge while the driving force of Mn vertical segregation is induced by the surfactant effect along the [001] direction.
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