低功率横向驱动纳米机电继电器的设计与材料选择

2012 IEEE International SOI Conference (SOI) Pub Date : 2012-10-01 DOI:10.1109/SOI.2012.6404401

K. Yoo, D. Lee, R. Tiberio, J. Conway, H. Wong, Y. Nishi

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引用次数: 3

摘要

采用COMSOL仿真方法对不同材料和结构的亚1V驱动的横向纳米机电(NEM)继电器进行了优化设计。实际测量的继电器驱动电压与仿真结果吻合较好。

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Design and materials selection for low power laterally actuating nanoelectromechanical relays

This paper reports the design optimization of lateral nanoelectromechanical (NEM) relays for sub 1V actuation by COMSOL simulation with various materials and structures. Measured actuation voltages from fabricated relays showed good matching with simulation.

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来源期刊

2012 IEEE International SOI Conference (SOI)

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