以梳齿驱动加速度计为例的对称结构网格划分

2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) Pub Date : 2018-04-01 DOI:10.1109/MEMSTECH.2018.8365722

C. Maj, Piotr Amrozik, W. Zabierowski

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引用次数: 1

摘要

本文介绍了一种单轴梳状驱动加速度计的设计。在Comsol软件中建立了该装置的三维模型并进行了分析。研究了传感器的力学性能，提取了传感器的电容变化、拉入电压、特征频率和抗冲击性能等基本参数。模拟表明，结果并不精确。我们发现造成这种误差的原因是模型的网格划分不正确。因此，我们展示了如何正确地执行网格以获得精确的结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Meshing of symmetric structures in example of comb-drive accelerometer

In this paper we present the design of one-axis comb-drive accelerometer. The 3-D model of such device was built and analyzed in Comsol. Mechanical behavior of the sensor was investigated and basic parameters was extracted such as capacitance change, pull-in voltage, eigenfrequency and shock resistance. Simulations showed that results are not precise. We found that the cause of such inaccuracy was incorrect meshing of model. Thus we show how to perform the mesh correctly to obtain precise results.

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2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)

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