压阻式压力模块的有限元仿真

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335638

V. Gridchin, M. A. Chebanov

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引用次数: 1

摘要

采用有限元模拟方法研究了压阻式模组中奇异点对应力分布的影响。本文提出了奇点对硅-玻璃界面应力分布的强烈影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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FEM simulation of piezoresistive pressure module

The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.

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2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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