集成微机械感应式传声器的频率分析

Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004. Pub Date : 2004-12-06 DOI:10.1109/ICM.2004.1434245

M. Jallouli, Fares Tounsi, B. Mezghani, S. Smaoui, M. Masmoudi

{"title":"集成微机械感应式传声器的频率分析","authors":"M. Jallouli, Fares Tounsi, B. Mezghani, S. Smaoui, M. Masmoudi","doi":"10.1109/ICM.2004.1434245","DOIUrl":null,"url":null,"abstract":"This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 /spl mu/m, are described. The purpose is to demonstrate a sensibility of the microphone.","PeriodicalId":359193,"journal":{"name":"Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Frequency analysis of integrated micromachined inductive microphone\",\"authors\":\"M. Jallouli, Fares Tounsi, B. Mezghani, S. Smaoui, M. Masmoudi\",\"doi\":\"10.1109/ICM.2004.1434245\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 /spl mu/m, are described. The purpose is to demonstrate a sensibility of the microphone.\",\"PeriodicalId\":359193,\"journal\":{\"name\":\"Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-12-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICM.2004.1434245\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2004.1434245","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文主要研究了集成式微机械感应式传声器的频率分析。这是集成传感器概念中非常重要的一步。这种新结构的概念是基于外部固定电感和内部悬浮电感之间互感的变化。内部电感器被制造在悬浮膜的顶部。我们的目标是提高悬架结构的共振频率。提出了一种新型的单片CMOS集成电感传声器的膜结构。我们研究了动力响应。对新模型的选择进行了推导和讨论。描述了利用SOLIDWORKS和COSMOSWORKS进行有限元分析确定的频率和相关模态振型，其技术为AMS 0.8 /spl mu/m。目的是演示麦克风的灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Frequency analysis of integrated micromachined inductive microphone

This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 /spl mu/m, are described. The purpose is to demonstrate a sensibility of the microphone.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.

自引率

0.00%

发文量