傅立叶变换光谱学移动镜支撑机构的设计与分析

2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME) Pub Date : 2020-05-01 DOI:10.1109/ICEDME50972.2020.00129

Feifei Tian, Siyuan Li

{"title":"傅立叶变换光谱学移动镜支撑机构的设计与分析","authors":"Feifei Tian, Siyuan Li","doi":"10.1109/ICEDME50972.2020.00129","DOIUrl":null,"url":null,"abstract":"Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and Analysis of a Moving Mirror Supporting Mechanism for Fourier Transform Spectroscopy\",\"authors\":\"Feifei Tian, Siyuan Li\",\"doi\":\"10.1109/ICEDME50972.2020.00129\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments.\",\"PeriodicalId\":155375,\"journal\":{\"name\":\"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEDME50972.2020.00129\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEDME50972.2020.00129","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

动镜支撑机构是傅里叶变换光谱仪(FTS)的关键部件，其运动精度和最大行程影响着仪器的性能。基于双平行四边形结构，设计了对称柔性动镜支撑机构。仿真结果表明，该系统允许镜面移动±5mm，倾斜值小于±4.8urad，剪切值小于3um。优异的剪切性能和倾斜性能使其非常适合大多数FTS仪器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Design and Analysis of a Moving Mirror Supporting Mechanism for Fourier Transform Spectroscopy

Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)

自引率

0.00%

发文量