像差校正电子显微镜

T. Vogt
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引用次数: 0

摘要

显微镜使我们能够观察到单凭四只眼睛无法看到的物体。用光学显微镜,我们可以区分可见光波长范围内的物体,即小于一微米。大约在1870年,奠定现代光学基础的恩斯特·阿贝提出,使用一些波长比可见光更短的未知辐射,即390纳米(1纳米= 10−9米)以下的辐射,可以提高显微镜的分辨率。电子加速器的波长可以接近1皮米(1分钟= 10−12米),因此应该可以区分原子,因为它们之间的距离通常至少为几百分钟。在这个过于简化的观点中,进一步减小辐射的波长应该使我们能够进一步提高电子显微镜的分辨率。然而,这只能通过增加辐射能量来实现,而辐射能量最终会破坏样品。其他因素也会影响电子显微镜的分辨率,其中电磁透镜的成像特性不理想,导致图像失真。人们花了半个多世纪的时间来了解和控制这些偏差,并将小于1 Ångstrom (1 Å = 10−10 m) 21的物体分开。1931年,在柏林科技大学Universität,马克斯·诺尔和他的博士生恩斯特·鲁斯卡展示了磁线圈可以用作电子的透镜,从而为发展扫清了道路
本文章由计算机程序翻译,如有差异,请以英文原文为准。
ABERRATION-CORRECTED ELECTRON MICROSCOPY
Microscopy allows us to observe objects we cannot see with our 4 eyes alone. With a light microscope, we can distinguish objects at 5 the scale of the wavelengths of visible light just under a microme6 ter. Around 1870 Ernst Abbe, who laid the foundation of modern 7 optics, suggested that the resolution of a microscope would improve 8 by using some yet-unknown radiation with shorter wavelengths than 9 visible light, that is, below 390 nanometers (1 nm= 10−9 m). Elec10 trons can have wavelengths near 1 picometer (1 pm= 10−12 m) and 11 should therefore allow atoms to be distinguished, since they are typ12 ically at least a few hundred pm apart. In this oversimplified view, 13 further decreasing the wavelength of the radiation should allow us to 14 increase the resolution of an electron microscopy even more. However, 15 this can only be done by increasing the energy of the radiation, which 16 would ultimately destroy the samples. Other factors also affect the 17 resolution of electron microscopes, among them non-ideal imaging 18 properties of electromagnetic lenses, which result in false images. It 19 took more than half a century to understand and control these aber20 rations and separate objects less than 1 Ångstrom (1 Å = 10−10 m) 21 apart. 22 At the Technische Universität Berlin in 1931, Max Knoll and his 23 doctoral student Ernst Ruska showed that magnetic coils could be 24 used as lenses for electrons and thereby cleared the path to developing
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