MEMS毫米波移相器的设计

ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364) Pub Date : 2000-09-14 DOI:10.1109/ICMMT.2000.895730

Zhu Shouzheng, Wang Ying, Wu Guanglong, Lai Zongsheng

{"title":"MEMS毫米波移相器的设计","authors":"Zhu Shouzheng, Wang Ying, Wu Guanglong, Lai Zongsheng","doi":"10.1109/ICMMT.2000.895730","DOIUrl":null,"url":null,"abstract":"The design of the MEMS millimeter-wave phase shifters for a millimeter-wave phased antenna array is given in this paper. The MEMS phase shifter has the advantages of small volume, light weight, wide frequency-band, low insertion loss, excellent reliability, easy integration with microwave circuits, and so on. A quasi-static numerical-analysis method together with microwave network theory are used to analyze and design the MEMS millimeter-wave phase shifter. A new structure of a MEMS phase shifter with better electrical characteristics is finally presented.","PeriodicalId":354225,"journal":{"name":"ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364)","volume":"113 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Design of MEMS millimeter-wave phase shifters\",\"authors\":\"Zhu Shouzheng, Wang Ying, Wu Guanglong, Lai Zongsheng\",\"doi\":\"10.1109/ICMMT.2000.895730\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The design of the MEMS millimeter-wave phase shifters for a millimeter-wave phased antenna array is given in this paper. The MEMS phase shifter has the advantages of small volume, light weight, wide frequency-band, low insertion loss, excellent reliability, easy integration with microwave circuits, and so on. A quasi-static numerical-analysis method together with microwave network theory are used to analyze and design the MEMS millimeter-wave phase shifter. A new structure of a MEMS phase shifter with better electrical characteristics is finally presented.\",\"PeriodicalId\":354225,\"journal\":{\"name\":\"ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364)\",\"volume\":\"113 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMMT.2000.895730\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMMT.2000.895730","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

介绍了一种用于毫米波相控阵的MEMS毫米波移相器的设计。MEMS移相器具有体积小、重量轻、频带宽、插入损耗低、可靠性好、易于与微波电路集成等优点。采用准静态数值分析方法，结合微波网络理论对MEMS毫米波移相器进行了分析和设计。最后提出了一种具有良好电学特性的MEMS移相器的新结构。

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Design of MEMS millimeter-wave phase shifters

The design of the MEMS millimeter-wave phase shifters for a millimeter-wave phased antenna array is given in this paper. The MEMS phase shifter has the advantages of small volume, light weight, wide frequency-band, low insertion loss, excellent reliability, easy integration with microwave circuits, and so on. A quasi-static numerical-analysis method together with microwave network theory are used to analyze and design the MEMS millimeter-wave phase shifter. A new structure of a MEMS phase shifter with better electrical characteristics is finally presented.

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ICMMT 2000. 2000 2nd International Conference on Microwave and Millimeter Wave Technology Proceedings (Cat. No.00EX364)

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