SOI CMOS, SiGe BiCMOS, GaAs HBT和GaAs PHEMT技术在耐辐射微波应用中的表征

D. Sotskov, A. Kuznetsov, V. Elesin, N. Usachev, G. Chukov, A. Nikiforov
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引用次数: 2

摘要

介绍了几种适合开发工作频率高达30 GHz的耐辐射收发器集成电路的工艺技术——CMOS绝缘体上硅(SOI) 180 nm工艺、CMOS 90 nm工艺、SiGe BiCMOS 0.42/0.25µm工艺、GaAs异质结双极晶体管(HBT) 2µm工艺和GaAs伪晶高电子迁移率晶体管(PHEMT) 0.5µm工艺。mw表征结果表明,在“代工”模式下制造的两种工艺技术- CMOS SOI 180 nm和CMOS 90 nm分别具有开发工作频率在3 GHz和12 GHz以上的收发器ic的潜力。获得的实验结果允许确定总电离剂量、中子、脉冲暴露和重离子的辐射耐受指标,并指定给定过程的关键元素和ip块碎片。实验数据可作为耐辐射收发器设计工艺合理选择的第一步。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SOI CMOS, SiGe BiCMOS, GaAs HBT and GaAs PHEMT Technologies Characterization for Radiation-Tolerant Microwave Applications
Radiation-oriented (RO-) and microwave (MW) characterization of the several process technologies – CMOS silicon-on-insulator (SOI) 180 nm process, CMOS 90 nm process, SiGe BiCMOS 0.42/0.25 µm process, GaAs heterojunction bipolar transistor (HBT) 2 µm process and GaAs pseudomorphic high electron mobility transistor (PHEMT) 0.5 µm process, which suitable for the development of radiation-tolerance transceiver integrated circuits with operating frequencies up to 30 GHz are presented. The results of MW-characterization showed two process technologies manufacturing in "foundry" mode – CMOS SOI 180 nm and CMOS 90 nm potentiality for the development of transceiver ICs with operating frequencies above 3 GHz and 12 GHz respectively. Obtained experimental results allow to determine radiation-tolerance indicators for the total ionizing dose, neutrons, impulse exposure and heavy ions and specify critical elements and IP-block fragments for given processes. Experimental data can be used at the first step of reasonable choice of process technologies for radiation-tolerant transceiver design.
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