TiNi形状记忆合金薄膜旋转驱动器

Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458) Pub Date : 1999-06-26 DOI:10.1109/HKEDM.1999.836414

C.C. Ma, Z. Wu, Q. Sun, Y. Zohar, M. Wong

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引用次数: 2

摘要

镍钛(TiNi)形状记忆合金薄膜具有变形力和恢复力大、电学性能和力学性能好、疲劳寿命长、耐腐蚀性能高等优点，是微致动领域的理想材料。

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TiNi shape memory alloy thin film rotating actuator

Nickel titanium (TiNi) shape memory alloy thin film is a promising candidate for microactuation because of its large deformation and recovery force, good electrical and mechanical properties, long fatigue life, and high corrosion resistance.

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来源期刊

Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)

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