多级mmic微型传输在线介质的比较

1996 26th European Microwave Conference Pub Date : 1996-10-01 DOI:10.1109/EUMA.1996.337677

T. Gokdemir, U. Karacaoglu, D. Budimir, I. Robertson, Q. Wang, A. Rezazadeh

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引用次数: 0

摘要

介绍了用多层MMIC工艺制作的微型传输线。这个过程产生三层金属层，用薄的介电膜隔开。结果表明，采用三金属层可以制造大量不同的传输线结构。比较了关键类型的特性，并给出了通线和耦合线的测量结果。

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A comparison of miniature transmission-line media for multi-level MMICs

Miniature transmission-lines fabricated with a multilayer MMIC process are presented. The process produces three metal layers, separated with thin dielectric films. With three metal layers it is shown that a large number of diverse transmission-line structures can be fabricated. The properties of the key types are compared and measured results for through-lines and coupled lines are presented.

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来源期刊

1996 26th European Microwave Conference

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