电应激氧化物中的电子俘获/脱俘获模型

Wang Hongyi, L. Cong, Zhang Bingbing, Xu Shunqiang, Z. Liming
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引用次数: 0

摘要

本文提出了一种电场氧化中电子捕获/去捕获的物理模型。该模型基于非弹性多声子阱辅助隧穿和热发射,并考虑了氧化体阱的捕获效应。建立了陷阱捕获和电子发射的动态过程。最后,可以准确、有效地获得在任意应力和任意时间下各氧化阱的填充状态,这对浮门非易失性存储器的寿命和数据保持特性的建模具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electron trapping/detrapping model in electrically stressed oxide
This paper proposed a physical model of electron trapping/detrapping in electrically stressed oxide. The new model is based on both inelastic multi-phonon trap-assisted tunneling and thermal emission, and the capture effect of oxide bulk traps is considered as well. The dynamic procedure of traps capture and emission of electrons are established. Finally, the filling state of all the oxide traps at any stress and any time can be obtained accurately and effectively which is very useful for the modeling of the endurance and data retention characteristics of floating gate nonvolatile memories.
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