利用线性集成霍尔传感器阵列获得用于无损检测的高空间分辨率扫描型磁相机图像

Jiseong Hwang, Jinyi Lee, Jongwoo Jun, Renliang Wang, Seho Choi, Seong-Pyo Hong
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引用次数: 13

摘要

漏磁检测(MFLT)是一种有效的检测磁化铁磁材料表面裂纹的无损检测方法,利用霍尔传感器等磁传感器测量磁化试样上磁场的分布。基于MFLT原理的扫描式磁相机,利用印制电路板(PCB)上的倾斜霍尔传感器阵列来高速检测微小裂纹。然而,波形出现在垂直于扫描的方向上,因为传感器在PCB上以不同的梯度和高度粘合,尽管小心焊接。本文提出在晶圆片上使用线性集成霍尔传感器(LIHS)来减少这些波,提高裂纹检测的概率。从钢坯中提取的试样用于确定LIHS在多重裂纹检测中的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Scan Type Magnetic Camera Images with a High Spatial Resolution for NDT Obtained By Using a Linearly Integrated Hall Sensors Array
Magnetic flux leakage testing (MFLT), which measures the distribution of a magnetic field on the magnetized specimen by using a magnetic sensor such as the Hall sensor, is an effective nondestructive testing (NDT) method for detecting surface crack on magnetized ferromagnetic materials. A scan type magnetic camera, based on the principle of MFLT, uses inclined Hall sensors array on the printed circuit board (PCB) to detect small cracks in high speed. However, the waveforms appear in the direction perpendicular to the scan, because the sensors are bonded at different gradients and heights on a PCB in spite of careful soldering. In this paper, the linearly integrated Hall sensors (LIHS) on a wafer are proposed to minimize these waves and to improve the probability of crack detection. The specimen took from a billet is used to determine the effectiveness of the LIHS in the multiple cracks detection.
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