在电偏置和温度应力作用下低k电介质中磁电阻的衰减

B. McGowan, J. Lloyd, A. M. Kennedy
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引用次数: 0

摘要

在低k介电SiCOH中发现,负磁电阻(MR)效应的大小随着电偏置和温度应力(BTS)的时间而减小。MR衰减与指数函数拟合得相当好,因此拟合的时间常数可以用来比较不同BTS条件下的衰减。观察到较高的电压和温度比相对较低的电压和温度衰减得更快。衰减的时间常数随电压变化,符合指数约为30的幂律,这与用SiCOH进行的TDDB时间对失效实验的电压依赖性相似。假设Arrhenius温度关系,衰变的活化能约为0.3 eV。表观活化能对施加在器件上的电场表现出微弱的依赖性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Decay of magnetoresistance in a low-k dielectric upon application of electrical bias and temperature stress
The magnitude of the negative magnetoresistance (MR) effect found in the low-k dielectric SiCOH is found to decrease with time on electrical bias and temperature stress (BTS). The MR decay fits an exponential function reasonably well such that the time constant of the fit can be used to compare decays due to different BTS conditions. Higher voltages and higher temperatures are observed to decay more rapidly than relatively lower voltages and temperatures. The time constant of the decay varies with voltage such that it fits a power law with an exponent of about 30 which bears resemblance to the voltage dependence of TDDB time to failure experiments conducted with SiCOH. Assuming an Arrhenius temperature relation, the decay has an activation energy of about 0.3 eV. The apparent activation energy displays a weak dependence on the electric field applied to the device.
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